Browsing by Author Sahir S.
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) | Supervisor(s) |
|---|---|---|---|
| 2021 | Tungsten passivation layer (WO3) formation mechanisms during chemical mechanical planarization in the presence of oxidizers | Poddar M.K.; Jalalzai P.; Sahir S.; Yerriboina N.P.; Kim T.-G.; Park J.-G. | - |